Reflection and transmission ellipsometry measurement under incoherent superposition of light

Yoriatsu Kitamura; Sota Mogi; Tsutomu Muranaka; Keisuke Arimoto; Eiichi Kondoh; Lianhua Jin; Bernard Gelloz

doi:10.1117/12.3005554

20 September 2023 Reflection and transmission ellipsometry measurement under incoherent superposition of light

Yoriatsu Kitamura, Sota Mogi, Tsutomu Muranaka, Keisuke Arimoto, Eiichi Kondoh, Lianhua Jin, Bernard Gelloz

Author Affiliations +

Proceedings Volume 12607, Optical Technology and Measurement for Industrial Applications Conference; 126070M (2023) https://doi.org/10.1117/12.3005554
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

Optical constants and thickness of a single layer on the transparent substrate can be extracted simultaneously from four ellipsometric parameters -Ψ_𝑟 , Δ_𝑟 , Ψ_𝑡 , Δ_𝑡 -, which are obtained through reflection and transmission ellipsometry measurement at a single wavelength and a single incidence angle. A transparent substrate, however, induces the problem of backside reflections, and then incoherent superposition of light. In this work, the effects of such reflections were empirically investigated as a function of incident angle and analyzed by using single-point measurement results obtained with a commercialized spectroscopic ellipsometer. Our study shows that at the Brewster angle illumination, the effect of backside reflection can be minimized. Based on this result, a reflection and transmission imaging ellipsometer was configured for the measurement of a Si film deposited on a quartz glass plate. The measurement results showed the availability, as well as the limitation, of the reflection and transmission imaging ellipsometry.

Citation Download Citation

Yoriatsu Kitamura, Sota Mogi, Tsutomu Muranaka, Keisuke Arimoto, Eiichi Kondoh, Lianhua Jin, and Bernard Gelloz "Reflection and transmission ellipsometry measurement under incoherent superposition of light", Proc. SPIE 12607, Optical Technology and Measurement for Industrial Applications Conference, 126070M (20 September 2023); https://doi.org/10.1117/12.3005554

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