MEMS tunable Fabry-Perot interferometers array for snap-shot multispectral imaging

Wenjing Wang; Binggen Chen; Peng Wang; Kaixuan He; Weiyi Zhao

doi:10.1117/12.2666306

4 April 2023 MEMS tunable Fabry-Perot interferometers array for snap-shot multispectral imaging

Wenjing Wang, Binggen Chen, Peng Wang, Kaixuan He, Weiyi Zhao

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126174B (2023) https://doi.org/10.1117/12.2666306
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

A 4*4 MEMS tunable FPF array for the full spectral range of three to five μm is designed. Different designs of quarter-wave optical thickness layer stacks reflectors and have been developed and analyzed. The better reflector with a broader reflectance spectrum and a lower phase shift was applied to completed FPF. The influence of both incident angel and cone angel of incident beam of FPF on transmittance spectrum have been investigated. For this device, each filter with different original optical cavity length can be electrostatically actuated individually. It may have the potential to applied to snap-shot multispectral imager and spectrometer.

Citation Download Citation

Wenjing Wang, Binggen Chen, Peng Wang, Kaixuan He, and Weiyi Zhao "MEMS tunable Fabry-Perot interferometers array for snap-shot multispectral imaging", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126174B (4 April 2023); https://doi.org/10.1117/12.2666306

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