Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer

Juncheol Bae; Jurim Jeon; Hwan Kim; Juyoung Yun; Yangjin Kim

doi:10.1117/12.2673498

10 August 2023 Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer

Juncheol Bae, Jurim Jeon, Hwan Kim, Juyoung Yun, Yangjin Kim

Author Affiliations +

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126182B (2023) https://doi.org/10.1117/12.2673498
Event: SPIE Optical Metrology, 2023, Munich, Germany

Conference Poster

There is no online version at this time. The PDF is only available to people who have bought the paper or have a subscription.

Citation Download Citation

Juncheol Bae, Jurim Jeon, Hwan Kim, Juyoung Yun, and Yangjin Kim "Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126182B (10 August 2023); https://doi.org/10.1117/12.2673498

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available