Laser computer-aided phase microscope with 10-nm resolution

Vladimir P. Tychinsky; Alexander V. Tavrov

doi:10.1117/12.20231

1 August 1990 Laser computer-aided phase microscope with 10-nm resolution

Vladimir P. Tychinsky, Alexander V. Tavrov

Proceedings Volume 1265, Industrial Inspection II; (1990) https://doi.org/10.1117/12.20231
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Previous measurements with computer-aided phase microscope using Linnik scheme with a dissector as coordinate sensitive detector showed an opportunity to obtain superdiffractional resolution d

Citation Download Citation

Vladimir P. Tychinsky and Alexander V. Tavrov "Laser computer-aided phase microscope with 10-nm resolution", Proc. SPIE 1265, Industrial Inspection II, (1 August 1990); https://doi.org/10.1117/12.20231

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