Surface figure correction using differential deposition of WSi2

Ch. Morawe; P. Bras; S. Labouré; F. Perrin; A. Vivo

doi:10.1117/12.2676633

3 October 2023 Surface figure correction using differential deposition of WSi₂

Ch. Morawe, P. Bras, S. Labouré, F. Perrin, A. Vivo

Proceedings Volume 12694, Advances in X-Ray/EUV Optics and Components XVIII; 1269405 (2023) https://doi.org/10.1117/12.2676633
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

The surface figure of an x-ray mirror was improved by differential deposition of WSi₂ layers. DC magnetron sputtering through beam-defining apertures was applied on moving substrates to generate thin films with arbitrary longitudinal thickness variations. The required velocity profiles were calculated using a deconvolution algorithm. Height errors were evaluated after each correction iteration using off-line visible light surface metrology. WSi₂ was selected as a promising material since it conserves the initial substrate surface roughness and limits the film stress to acceptable levels. On a 300 mm long flat Si mirror the shape error was reduced to less than 0.2 nm RMS.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ch. Morawe, P. Bras, S. Labouré, F. Perrin, and A. Vivo "Surface figure correction using differential deposition of WSi₂", Proc. SPIE 12694, Advances in X-Ray/EUV Optics and Components XVIII, 1269405 (3 October 2023); https://doi.org/10.1117/12.2676633

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