Research on automatic detection method for surface defects of large-size gratings

Mengqing Xu; Xingxue Li; Shanwen Zhang; Chong Lin; Changhe Zhou; Jin Wang; Wei Jia

doi:10.1117/12.2687124

27 November 2023 Research on automatic detection method for surface defects of large-size gratings

Mengqing Xu, Xingxue Li, Shanwen Zhang, Chong Lin, Changhe Zhou, Jin Wang, Wei Jia

Proceedings Volume 12768, Holography, Diffractive Optics, and Applications XIII; 127681V (2023) https://doi.org/10.1117/12.2687124
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In this paper, a grating defect detection system based on the principle of darkfield imaging is proposed for the surface defect detection of existing large-size gratings, and the corresponding mechanical device is built. The device mainly includes two categories: hardware system and software system, of which the hardware system has lighting module, image acquisition and displacement module, and the software system has target edge reconstruction module and target edge detection module. Through the device, the surface defects of two-dimensional diffraction gratings of different sizes and different process conditions (substrate, mask grating, etching grating and coating grating) are automatically detected, and the statistical data of different types of defects are given. Through the analysis and study of the cause, transmittance and how to avoid different kinds of grating defects, whether it will affect the optical performance of grating use.The experimental results show that the proposed system meets the needs of large-size grating surface defect detection and evaluation in terms of accuracy and accuracy of defect detection, and the mechanical structure of the device is simple and compact, which has the potential of industrial large-scale detection. The device is of great significance for evaluating large-size high-precision grating manufacturing technology.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Mengqing Xu, Xingxue Li, Shanwen Zhang, Chong Lin, Changhe Zhou, Jin Wang, and Wei Jia "Research on automatic detection method for surface defects of large-size gratings", Proc. SPIE 12768, Holography, Diffractive Optics, and Applications XIII, 127681V (27 November 2023); https://doi.org/10.1117/12.2687124

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KEYWORDS

Diffraction gratings

Defect detection

Illumination software

Imaging systems

Target acquisition

Target detection

Image acquisition

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