Dynamic illumination in phase-shifting interferometry

Leslie L. Deck; Nate Austin

doi:10.1117/12.2690821

29 November 2023 Dynamic illumination in phase-shifting interferometry

Leslie L. Deck, Nate Austin

Proceedings Volume 12778, Optifab 2023; 127780O (2023) https://doi.org/10.1117/12.2690821
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

Phase-shifting interferometry is the premier measurement technique for high-precision surface form metrology. Generally, the measurement cavity is illuminated with a stationary, on-axis, point-like source of coherent light situated at the interferometer source plane. We describe how to enable a variety of useful functions to aid interferometric metrology applications by dynamically moving the source point during a phase-shifting measurement using steering mirror technology. Called Dynamic Illumination, these motions describe trajectories that often take the form of geometric primitives like points, lines, arcs, circles, and spirals. A fixed point on the optical axis represents conventional operation, but measurements using different trajectories enable different functions. We highlight three exemplary functions in this paper; phase shifting, autofocus, and coherent noise reduction techniques.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Leslie L. Deck and Nate Austin "Dynamic illumination in phase-shifting interferometry", Proc. SPIE 12778, Optifab 2023, 127780O (29 November 2023); https://doi.org/10.1117/12.2690821

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available