A study of intra-die vs. inter-die feature size control

Reed Welch

doi:10.1117/12.3011318

10 October 2023 A study of intra-die vs. inter-die feature size control

Reed Welch

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 1280704 (2023) https://doi.org/10.1117/12.3011318
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

The title of our topic this morning will be Inter-die vs. Intra-die Feature Size Control. The mask industry is traditionally focused on die to die control, whereas today we’re going to take a closer look at the intra-die feature size control and what role it has to play as a source of error for feature size.

Citation Download Citation

Reed Welch "A study of intra-die vs. inter-die feature size control", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 1280704 (10 October 2023); https://doi.org/10.1117/12.3011318

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