An overview of Magnetron sputtering

Robert Allen

doi:10.1117/12.3011326

10 October 2023 An overview of Magnetron sputtering

Robert Allen

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 128070C (2023) https://doi.org/10.1117/12.3011326
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

Good afternoon. The paper that I’m going to present this afternoon, entitled “An Overview of Magnetron Sputtering”, will examine briefly some of the sputtering techniques other than Magnetron sputtering, lead into a discussion of post and planar Magnetron technologies. Some comparisons will be made of the above mentioned techniques, their advantages and disadvantages and a discussion of their production capability with respect to process repeatability and product through-put.

Citation Download Citation

Robert Allen "An overview of Magnetron sputtering", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 128070C (10 October 2023); https://doi.org/10.1117/12.3011326

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