Ultraviolet beam pattern control in second and third harmonic generation by spatial wavefront modulation of near-infrared driving wavelength

Seungjai Won; Taewon Kim; Seungman Choi; Byunggi Kim; Seung-Woo Kim; Joohyung Lee; Young-Jin Kim

doi:10.1117/12.3000457

12 March 2024 Ultraviolet beam pattern control in second and third harmonic generation by spatial wavefront modulation of near-infrared driving wavelength

Seungjai Won, Taewon Kim, Seungman Choi, Byunggi Kim, Seung-Woo Kim, Joohyung Lee, Young-Jin Kim

Author Affiliations +

Proceedings Volume 12869, Nonlinear Frequency Generation and Conversion: Materials and Devices XXIII; 128690L (2024) https://doi.org/10.1117/12.3000457
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

The ultraviolet (UV) wavelengths are gaining attention in various applications including lithography, imaging, and spectroscopy due to their high photon energy and high spatial resolution. However, the strong UV absorption has required specialized optics for beam shaping and wavefront manipulation of the UV. In this paper, a novel beam shaping of UV is demonstrated by manipulating the wavefront of a near-infrared (NIR, λ=800 nm) driving laser in harmonic generation. The preservation of spatiotemporal coherence in harmonic generation allows the transfer of the spatial beam distribution from the IR driver to the UV harmonics. To separate the UV beam from the strong NIR background, a non-collinear harmonic generation configuration is employed. By using quartz and MgO nonlinear medium, the pattern of 2nd harmonic UV (λ=400 nm) and 3rd harmonic deep-UV (λ=266 nm) waves were manipulated. Our technique allows the wavefront control of UV laser beams in UV optical metrology and patterning.

Conference Presentation

Citation Download Citation

Seungjai Won, Taewon Kim, Seungman Choi, Byunggi Kim, Seung-Woo Kim, Joohyung Lee, and Young-Jin Kim "Ultraviolet beam pattern control in second and third harmonic generation by spatial wavefront modulation of near-infrared driving wavelength", Proc. SPIE 12869, Nonlinear Frequency Generation and Conversion: Materials and Devices XXIII, 128690L (12 March 2024); https://doi.org/10.1117/12.3000457

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