Ion beam codeposition of HTSC films on SrTiO3 and ITO/Si

Davor Pavuna; Bruce J. Kellett; Benjamin Dwir; Jonathan H. James; Andrea Gauzzi; James R. Faulkner Jr.; M. Affronte; F. K. Reinhardt

doi:10.1117/12.20894

1 October 1990 Ion beam codeposition of HTSC films on SrTiO3 and ITO/Si

Davor Pavuna, Bruce J. Kellett, Benjamin Dwir, Jonathan H. James, Andrea Gauzzi, James R. Faulkner Jr., M. Affronte, F. K. Reinhardt

Author Affiliations +

Proceedings Volume 1287, High Tc Superconductivity: Thin Films and Applications; (1990) https://doi.org/10.1117/12.20894
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

Superconducting YBa2C u 3 0 7 (YBCO) thin films were grown on Si with transparent, conducting Indium Tin Oxide (ITO) buffer layers The onset temperature at 92K and zero resistance at 68K were measured. Both, ITO and YBCO films were deposited by ion beam co-deposition. The YBCO/ITO films exhibit metallic resistivity with positive slopes (r0.055 1K). The YBCO is uniform, textured and polycrystalline. The relevance for hybrid opto-electronic device structures is briefly discussed.

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Davor Pavuna, Bruce J. Kellett, Benjamin Dwir, Jonathan H. James, Andrea Gauzzi, James R. Faulkner Jr., M. Affronte, and F. K. Reinhardt "Ion beam codeposition of HTSC films on SrTiO3 and ITO/Si", Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); https://doi.org/10.1117/12.20894

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