Development of on-machine surface profile measuring instrument based on white light interference principle

Yuejia Huang; Duo Li; Bo Wang

doi:10.1117/12.3009730

29 December 2023 Development of on-machine surface profile measuring instrument based on white light interference principle

Yuejia Huang, Duo Li, Bo Wang

Author Affiliations +

Proceedings Volume 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023); 1297628 (2023) https://doi.org/10.1117/12.3009730
Event: 8th Asia Pacific Conference on Optics Manufacture & 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, 2023, Shenzhen, China

Abstract

For most of the current white light interferometer mechanical structure are vertical structure and the size of the inspected parts have limitations, this paper mainly uses white light vertical scanning measurement technology to develop the measurement system for in-situ measurement of ultra-precision machined parts surface three-dimensional topography, white light interferometer mechanical structure design and machine tool integration, to carry out the design of the mechanical structure of the white light interferometer and the integration of the machine tool, and the completion of the measurement system to build a physical example of the system to test the verification of the reliability of the system.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuejia Huang, Duo Li, and Bo Wang "Development of on-machine surface profile measuring instrument based on white light interference principle", Proc. SPIE 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023), 1297628 (29 December 2023); https://doi.org/10.1117/12.3009730

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KEYWORDS

Optical interferometry

Optical testing

Equipment

Optical path differences

Signal to noise ratio

Fourier transforms

Objectives

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