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The design of a miniature eddy current transducer has been developed and improved, a hardware and software complex has been constructed, and methods for testing thin metal films have been presented. The results of measurements using the developed eddy current transducer operating under the control of a hardware and software complex are presented. The possibility of using the developed system to study the thickness of thin metal films is demonstrated. The dependences of the amplitude of the output signal of the ETC on the frequency of the exciting signal when scanning a thin copper film were obtained. A dependence has been compiled demonstrating the relationship between film thickness and electrical conductivity.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Alexander Katasonov,Vladimir Malikov,Sergey Voinash,Irina Vornacheva,Ramil Zagidullin, andStanislav Akhmetshin
"Measuring the thickness of thin metal films using an eddy current software and hardware complex", Proc. SPIE 12986, Third International Scientific and Practical Symposium on Materials Science and Technology (MST-III 2023), 1298608 (19 January 2024); https://doi.org/10.1117/12.3016516
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Alexander Katasonov, Vladimir Malikov, Sergey Voinash, Irina Vornacheva, Ramil Zagidullin, Stanislav Akhmetshin, "Measuring the thickness of thin metal films using an eddy current software and hardware complex," Proc. SPIE 12986, Third International Scientific and Practical Symposium on Materials Science and Technology (MST-III 2023), 1298608 (19 January 2024); https://doi.org/10.1117/12.3016516