High performance grating couplers for mid-infrared applications based on multiparameter optimization of geometry characteristics

Thenia Prousalidi; Giannis Poulopoulos; Evrydiki Kyriazi; Georgios Syriopoulos; Nour Negm; Stephan Suckow; Charalampos Zervos; Dimitrios Apostolopoulos; Hercules Avramopoulos

doi:10.1117/12.3021966

18 June 2024 High performance grating couplers for mid-infrared applications based on multiparameter optimization of geometry characteristics

Thenia Prousalidi, Giannis Poulopoulos, Evrydiki Kyriazi, Georgios Syriopoulos, Nour Negm, Stephan Suckow, Charalampos Zervos, Dimitrios Apostolopoulos, Hercules Avramopoulos

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Proceedings Volume 13012, Integrated Photonics Platforms III; 1301205 (2024) https://doi.org/10.1117/12.3021966
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

This paper presents a novel design of grating couplers in the SiPh platform, as part of the development of a gas sensing system, that measures specific gas concentration through on-chip absorption based spectroscopy in the mid-infrared. The grating is based on 400 nm SOI rib waveguide platform, targeting gaussian emission profile. We investigate both uniform and non-unifοrm grating designs. We show maximum coupling efficiency optimized by 65% at the center wavelength of 4.3 μm, and broadband response. A tolerance study investigating the Si height and etch depth variations indicate very good tolerance to fabrication imperfections across the investigated spectral range of 4.25-4.35 μm. The proposed methodology can be used to engineer grating coupler emission profiles for other applications and platforms.

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Thenia Prousalidi, Giannis Poulopoulos, Evrydiki Kyriazi, Georgios Syriopoulos, Nour Negm, Stephan Suckow, Charalampos Zervos, Dimitrios Apostolopoulos, and Hercules Avramopoulos "High performance grating couplers for mid-infrared applications based on multiparameter optimization of geometry characteristics", Proc. SPIE 13012, Integrated Photonics Platforms III, 1301205 (18 June 2024); https://doi.org/10.1117/12.3021966

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