"Smart" high-precision microposition feedback control device: theory and experiment

Horn-Sen Tzou

doi:10.1117/12.21500

1 October 1990 "Smart" high-precision microposition feedback control device: theory and experiment

Horn-Sen Tzou

Proceedings Volume 1303, Advances in Optical Structure Systems; (1990) https://doi.org/10.1117/12.21500
Event: 1990 Technical Symposium on Optics, Electro-Optics, and Sensors, 1990, Orlando, FL, United States

Abstract

Ultra High-precision operation is very essential in many optical instruments and modern manufacturing systems. However, mechanical vibrations introduced by various sources can easily disrupt this delicate operation. Thus, active vibration isolation and control becomes very important in many circimstance. This paper presents a "smart" active micro-position feedback control technique using a piezoelectric actuator. A general theory for the piezoelectric actuator subjected to mechanical excitations and feedback voltages is developed. This theory is applied to an active micro-position control by injecting a processed feedback voltage at variable feedback gains into the piezoelectric actuator. Effectiveness of the piezoelectric micro-position attenuation is evaluated analytically and experimentally. Theoretical solutions are compared favorably with the laboratory experimental results.

Citation Download Citation

Horn-Sen Tzou ""Smart" high-precision microposition feedback control device: theory and experiment", Proc. SPIE 1303, Advances in Optical Structure Systems, (1 October 1990); https://doi.org/10.1117/12.21500

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