Lobster eye x-ray optics fabricated with MEMS technologies

Kumi Ishikawa; Yuichiro Ezoe; Masaki Numazawa; Daiki Ishi; Rei Ishikawa; Yudai Yamada; Hiromi Morishita; Yukine Tsuji; Takatoshi Murakawa; Luna Sekiguchi; Daiki Morimoto; Aoi Ishimure; Yuto Ogasawara; Shunei Miyauchi

doi:10.1117/12.3020780

21 August 2024 Lobster eye x-ray optics fabricated with MEMS technologies

Kumi Ishikawa, Yuichiro Ezoe, Masaki Numazawa, Daiki Ishi, Rei Ishikawa, Yudai Yamada, Hiromi Morishita, Yukine Tsuji, Takatoshi Murakawa, Luna Sekiguchi, Daiki Morimoto, Aoi Ishimure, Yuto Ogasawara, Shunei Miyauchi

Author Affiliations +

Proceedings Volume 13093, Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray; 1309359 (2024) https://doi.org/10.1117/12.3020780
Event: SPIE Astronomical Telescopes + Instrumentation, 2024, Yokohama, Japan

Conference Poster

Abstract

Lobster eye optics are expected as to be a wide-field telescope and are suitable for future X-ray sky surveys and monitoring missions. The ultra-lightweight X-ray optics have been developed using MEMS technologies and the same way can be applied to the fabrication of lobster eye optics. A large number of slits with 20 micro-meters width were formed by an etching process in a 4-inch Si wafer with 300 micro-meters thickness. To collect X-rays on a focal plane, the wafer was plastic-deformed into a spherical shape with a radius of curvature of 1000 mm. Two deformed wafers were assembled in such a way as to arrange the slits of each wafer orthogonally. Then, samples of lobster eye optics were completed and the fabrication process flow with MEMS technologies can be confirmed.

Citation Download Citation

Kumi Ishikawa, Yuichiro Ezoe, Masaki Numazawa, Daiki Ishi, Rei Ishikawa, Yudai Yamada, Hiromi Morishita, Yukine Tsuji, Takatoshi Murakawa, Luna Sekiguchi, Daiki Morimoto, Aoi Ishimure, Yuto Ogasawara, and Shunei Miyauchi "Lobster eye x-ray optics fabricated with MEMS technologies", Proc. SPIE 13093, Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray, 1309359 (21 August 2024); https://doi.org/10.1117/12.3020780

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available