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In this paper, a whole general design and optimization process is detailedly demonstrated by taking the design and optimization of a 55mm diameter variable curvature mirror(VCM) with a cycloid-like thickness distribution as example. The finite-element analysis to the VCM under each change of main structure parameter is done and analyzed to choose the proper parameter value of each structure to obtain the optimum surface figure accuracy. Finally, the designed VCM can achieve 0.386mm central deflection and RMS 82.84nm within the effective aperture 28.4mm.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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