Fast and accurate fringe projection based on a MEMS microvibration mirror

Min Han; Xiaohao Wang; Xinghui Li

doi:10.1117/12.3036360

20 November 2024 Fast and accurate fringe projection based on a MEMS microvibration mirror

Min Han, Xiaohao Wang, Xinghui Li

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 1324103 (2024) https://doi.org/10.1117/12.3036360
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

In the traditional fringe projection technique, the speed of projecting 8-bit sinusoidal fringe patterns is slow. To address this issue, this paper designs a novel high-speed MEMS projector by using its high-frequency resonant and forward-reverse scanning. In high-speed projection mode, light sources may be unstable and produce more light-intensity noise. To reduce the standard deviation of phase errors, this paper proposes a method of generating high-quality sinusoidal fringe patterns. The proposed method encodes the traditional fringe pattern into the phase of the sinusoidal fringe pattern. Therefore, from a mathematical expression perspective, the actual projection pattern is a composition of two sine functions. The proposed method uses multiple projected patterns to computationally generate a high-quality phase-shifting pattern. Subsequently, the high-accuracy phase can be solved by using a phase-shifting method to process these generated high-quality phase-shifting patterns. Finally, the experimental results demonstrate the feasibility of the self-developed MEMS projector and the robust noise resistance of the proposed method. Compared to the traditional phase-shifting method, the proposed method can significantly improve phase accuracy in the case of the same required number of images.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Min Han, Xiaohao Wang, and Xinghui Li "Fast and accurate fringe projection based on a MEMS microvibration mirror", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 1324103 (20 November 2024); https://doi.org/10.1117/12.3036360

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KEYWORDS

Microelectromechanical systems

Micromirrors

Phase shifts

Calibration

Modulation

Structured light

Projection systems

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