Assessment of the impact of autocollimator operating conditions on the accuracy of angular measurements

Roman A. Larichev; Yuri V. Filatov

doi:10.1117/12.3036325

20 November 2024 Assessment of the impact of autocollimator operating conditions on the accuracy of angular measurements

Roman A. Larichev, Yuri V. Filatov

Author Affiliations +

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410D (2024) https://doi.org/10.1117/12.3036325
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

Autocollimator is a common device for non-contact measurement of the angular position of objects in space. Its accuracy can vary from a few arc seconds to a hundredth of an arc second, and the more accurate the device, the more factors must be taken into account during measurements. At the moment, there is already a significant body of research on the factors that affect angular measurements using an autocollimator. These include the size, reflectivity, and flatness of the reflecting surface; the distance between the surface and the autocollimator; the presence and configuration of any aperture in the beam path of the autocollimator; and many other factors. Typically, the object of these studies is a high-precision autocollimator (with accuracy greater than 0.1 arc seconds), and the contribution of studied parameters is usually less than 1-2 tenths of an arc second.

In the process of using a less accurate digital autocollimator (with a claimed accuracy of 0.25 arc seconds), the authors also encountered the influence of various parameters in the measurement setup, but of a greater value. This led to additional research.

This paper presents an experimental analysis of the complex effects of the distance to the reflecting surface and its size, as well as the impact of non-flatness on the surface. The random errors of the autocollimator in different operating modes are also analyzed.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Roman A. Larichev and Yuri V. Filatov "Assessment of the impact of autocollimator operating conditions on the accuracy of angular measurements", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410D (20 November 2024); https://doi.org/10.1117/12.3036325

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KEYWORDS

Autocollimators

Reflection

Reticles

Matrices

Mirrors

Calibration

Optical surfaces

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