Calibrating multispot illumination for asphere metrology using shear-interferometry

André F. Müller; Beñat Gutiérrez-Cañas Pazos; Nikodem Mitura; Gerd Ehret; Claas Falldorf; Ralf B. Bergmann

doi:10.1117/12.3037594

20 November 2024 Calibrating multispot illumination for asphere metrology using shear-interferometry

André F. Müller, Beñat Gutiérrez-Cañas Pazos, Nikodem Mitura, Gerd Ehret, Claas Falldorf, Ralf B. Bergmann

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410N (2024) https://doi.org/10.1117/12.3037594
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

The use of aspherical and freeform optics is increasingly prevalent to overcome aberrations and facilitate compact optical systems. However, achieving simultaneously fast, flexible, and accurate measurements of such surfaces remains a challenge. Multiple Aperture Shear-Interferometry (MArS) utilizes multi-spot illumination to measure a wide spectrum of such surfaces without adjusting the measurement system. Using the wave vectors of wave fields reflected by the surface as well as the positions of the individual light sources, the surface form is reconstructed using an inverse ray-tracing approach. Hence, the accuracy of the measurement directly depends on knowledge of these entities. In this publication we present a calibration approach for wave vectors incident across the measurement plane. Secondly, we introduce a geometric and spectral calibration method for the multi-spot illumination, ensuring accurate and consistent measurements across diverse surfaces.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

André F. Müller, Beñat Gutiérrez-Cañas Pazos, Nikodem Mitura, Gerd Ehret, Claas Falldorf, and Ralf B. Bergmann "Calibrating multispot illumination for asphere metrology using shear-interferometry", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410N (20 November 2024); https://doi.org/10.1117/12.3037594

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