The performance evaluation for dimensional measurements with industrial computed tomography systems

Lei Tao; Chunlin Huo; Jin Zhou; Sen Zhou

doi:10.1117/12.3037029

20 November 2024 The performance evaluation for dimensional measurements with industrial computed tomography systems

Lei Tao, Chunlin Huo, Jin Zhou, Sen Zhou

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410R (2024) https://doi.org/10.1117/12.3037029
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

In modern intelligent living, X-ray computed tomography (CT) exhibit the great potential in industry for non-destructive dimensional quality control purposes, which serving a range of monitoring and management, from chips, integrated circuits, batteries, and automotive components. In this paper, a special standard sample was designed and manufactured to test critical dimensional characteristics on different CT systems. Additionally, a sequential participation scheme, together with detailed measurement procedures and reporting instructions, has been proposed to evaluate measurement uncertainty and determine metrological performances of CT systems. Finally, a series of experimental tests were carried out to demonstrate dimensional measurement errors of CT systems. Those results have been proven to be amenable for practical purposes through many tests so that it might be applicable to achieve accuracy and traceability issues of CT systems in industrial intelligent production line.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lei Tao, Chunlin Huo, Jin Zhou, and Sen Zhou "The performance evaluation for dimensional measurements with industrial computed tomography systems", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410R (20 November 2024); https://doi.org/10.1117/12.3037029

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