Surface analysis of large-aperture flat changing under various supports

Yanjun Wang; Yuhang Shen; Ying Yang; Liwei Zhang; Sen Han; Jiaqi Qin; Linji Ji; Chengliang Fu

doi:10.1117/12.3035231

20 November 2024 Surface analysis of large-aperture flat changing under various supports

Yanjun Wang, Yuhang Shen, Ying Yang, Liwei Zhang, Sen Han, Jiaqi Qin, Linji Ji, Chengliang Fu

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132411G (2024) https://doi.org/10.1117/12.3035231
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Conference Poster

Abstract

In the measurement of large-aperture flat, mechanical stress arises from the contact between the flat and supporting materials, which is influenced by both gravity and temperature. This stress induces surface deformation, consequently impacting the optical system's image quality. To enhance support efficacy, the finite element method was used to analyze the surface deformation of these flats across various vertical and horizontal support configurations. Distribution patterns arising from the effects of gravity and temperature on flat surface shape were also inverstigated. Analysis reveals that the use of horizontal support induces more conspicuous gravity-induced deformation when compared to vertical support. Additionally, results show that temperature has a more significant effect on flat surface deformation than gravity. The findings of this study offer pertinent insights for designing support structures for large-aperture flat and implementing temperature control measures in experiments.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yanjun Wang, Yuhang Shen, Ying Yang, Liwei Zhang, Sen Han, Jiaqi Qin, Linji Ji, and Chengliang Fu "Surface analysis of large-aperture flat changing under various supports", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132411G (20 November 2024); https://doi.org/10.1117/12.3035231

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