Analysis of measurement error for the absolute testing of flat

Linji Ji; Sen Han; Yuhang Shen; Liwei Zhang; Ying Yang; Yanjun Wang; Chengliang Fu; Jiaqi Qin

doi:10.1117/12.3036063

20 November 2024 Analysis of measurement error for the absolute testing of flat

Linji Ji, Sen Han, Yuhang Shen, Liwei Zhang, Ying Yang, Yanjun Wang, Chengliang Fu, Jiaqi Qin

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132411Q (2024) https://doi.org/10.1117/12.3036063
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Conference Poster

Abstract

Absolute measurement is based on the Fizeau interferometer system, which features a common optical path that mitigates the impact of system-specific errors and is less sensitive to environmental changes. Currently, methods for flat absolute measurement include: the three-plate mutual inspection method, the odd-even function method, the rotational symmetry method, and the mirror symmetry method, etc. Typically, the odd-even function method is used for flat absolute measurement, but it is commonly used and has proven effective for circular domain boundary conditions in existing absolute surface measurements. To measure and fit rectangular domain boundary conditions, this paper also utilizes Zernike polynomials and Chebyshev polynomials to fit rectangular domains, with Schmidt orthogonalization used to achieve Zernike fitting for rectangular domains, and their performance is compared.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Linji Ji, Sen Han, Yuhang Shen, Liwei Zhang, Ying Yang, Yanjun Wang, Chengliang Fu, and Jiaqi Qin "Analysis of measurement error for the absolute testing of flat", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132411Q (20 November 2024); https://doi.org/10.1117/12.3036063

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