Construction of quartz crystal etching rate database based on Hubbard interpolation method

Shuanqiang Song; Chengbao Lv; Xinjia Zhao; Zibo Xu; Qi Chen; Meng Zhao; Jing Ji

doi:10.1117/12.3052576

30 December 2024 Construction of quartz crystal etching rate database based on Hubbard interpolation method

Shuanqiang Song, Chengbao Lv, Xinjia Zhao, Zibo Xu, Qi Chen, Meng Zhao, Jing Ji

Author Affiliations +

Proceedings Volume 13394, International Workshop on Automation, Control, and Communication Engineering (IWACCE 2024); 133941I (2024) https://doi.org/10.1117/12.3052576
Event: International Workshop on Automation, Control, and Communication Engineering (IWACCE 2024), 2024, Hohhot, China

Abstract

This study utilizes the Hubbard interpolation method to partition the etching directions of quartz crystal into 96 triangular regions based on 13 crystal planes. The etching rates in various directions on each crystal plane of quartz can be obtained through mask design and rate measurement experiment. By measuring the etching rates of multiple types of crystal-cut wafers and considering the symmetry of quartz, the etching rates in various directions on the 13 crystal planes can be determined. At the boundaries of the triangular regions, a series of sampling points are selected to further subdivide the triangular regions into smaller triangles. Utilizing the Hubbard interpolation method, the etching rates of crystal orientations within each small region can be computed. Finally, employing Hubbard interpolation on each triangular region yields the complete quartz crystal etching rate database covering all directions.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shuanqiang Song, Chengbao Lv, Xinjia Zhao, Zibo Xu, Qi Chen, Meng Zhao, and Jing Ji "Construction of quartz crystal etching rate database based on Hubbard interpolation method", Proc. SPIE 13394, International Workshop on Automation, Control, and Communication Engineering (IWACCE 2024), 133941I (30 December 2024); https://doi.org/10.1117/12.3052576

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