EUV performance of a multilayer-coated high-density toroidal grating

Ritva A. M. Keski-Kuha; Roger J. Thomas; Werner M. Neupert; Charles E. Condor; Jeffrey S. Gum

doi:10.1117/12.23233

1 February 1991 EUV performance of a multilayer-coated high-density toroidal grating

Ritva A. M. Keski-Kuha, Roger J. Thomas, Werner M. Neupert, Charles E. Condor, Jeffrey S. Gum

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23233
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Performance of a multilayer coated diffraction grating has been evaluated in the EUV. The application of a multilayer coating to a blazed toroidal grating of high ruling density has produced a significant enhancement in grating efficiency in the 30 run spectral region in first order and has maintained the excellent quasi stigmatic spectral resolution of the grating.

Citation Download Citation

Ritva A. M. Keski-Kuha, Roger J. Thomas, Werner M. Neupert, Charles E. Condor, and Jeffrey S. Gum "EUV performance of a multilayer-coated high-density toroidal grating", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23233

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