High-precision and traceable equipment for measuring aspheric mirror surface

Xinrui Fan; Xiaofei Diao; Jianwei Wu; Yanhui Kang

doi:10.1117/12.3047986

13 December 2024 High-precision and traceable equipment for measuring aspheric mirror surface

Xinrui Fan, Xiaofei Diao, Jianwei Wu, Yanhui Kang

Author Affiliations +

Proceedings Volume 13497, AOPC 2024: Optical Design and Manufacturing; 134970D (2024) https://doi.org/10.1117/12.3047986
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China

Abstract

In recent years, the superior optical properties of complex aspherical elements have provided optical designers with greater flexibility, leading to an explosive growth in demand across various applications. High-precision and reliable profile measurement technology is crucial for ensuring the quality of aspherical processing and the proper functioning of optical systems. To achieve high-precision, traceable measurements of complex aspherical mirror surfaces, a non-contact coordinate scanning measurement equipment based on an independent metrological loop is proposed. This equipment incorporates a dedicated metrology frame and utilizes multiple interferometric systems for real-time, accurate measurements of aspheric surfaces, ensuring the results are traceable to the SI definition of the meter. Specifically, the equipment features three co-referenced interferometric systems: two for real-time tracking of the optical probe's spatial position, and the third integrated within the miniature interferometric probe for measuring the surface shape of complex aspherical mirrors. The measurement principles of the interferometric systems are explained in detail. Each interferometric system utilizes a highly integrated waveplate-array quadrant photodetector to minimize optical components, mitigate processing and installation errors, significantly reduce system volume and mass, and decrease equipment load. Partial surfaces of standard spheres and aspherical mirrors were tested. The results showed a measurement error of less than 0.2 μm and the repeatability of 70 nm, achieving sub-micron accuracy.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xinrui Fan, Xiaofei Diao, Jianwei Wu, and Yanhui Kang "High-precision and traceable equipment for measuring aspheric mirror surface", Proc. SPIE 13497, AOPC 2024: Optical Design and Manufacturing, 134970D (13 December 2024); https://doi.org/10.1117/12.3047986

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Aspheric lenses

Optical surfaces

Mirror surfaces

Interferometry

Metrology

Mirrors

Photodetectors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years