Design of high-efficiency and broadband SiN-on-SOI grating couplers based on CUMEC’s process platform

Wenhao Zhai; Hanmeng Li; Zhixiong Xiao; Sizhu Shao; Junbo Feng

doi:10.1117/12.3046706

13 December 2024 Design of high-efficiency and broadband SiN-on-SOI grating couplers based on CUMEC’s process platform

Wenhao Zhai, Hanmeng Li, Zhixiong Xiao, Sizhu Shao, Junbo Feng

Author Affiliations +

Proceedings Volume 13499, AOPC 2024: Optical Devices and Integration; 134990I (2024) https://doi.org/10.1117/12.3046706
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China

Abstract

Silicon nitride-on-SOI grating couplers are specifically designed for the O- and C-bands, utilizing CUMEC's advanced process platform. Through simulation, we have achieved an impressive maximum coupling efficiency of -1.4 dB and -1.8 dB to standard single-mode fiber for the O- and C-bands respectively, accompanied by a remarkable 1-dB bandwidth of 70 nm and 78 nm. Furthermore, we have conducted an analysis on fabrication variation tolerance.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wenhao Zhai, Hanmeng Li, Zhixiong Xiao, Sizhu Shao, and Junbo Feng "Design of high-efficiency and broadband SiN-on-SOI grating couplers based on CUMEC’s process platform", Proc. SPIE 13499, AOPC 2024: Optical Devices and Integration, 134990I (13 December 2024); https://doi.org/10.1117/12.3046706

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