Highly sensitive refractive index sensing based on  SOI subwavelength grating microring resonators

Shaoshuai Han; Mingxiang Yang; Hongxia Gao; Shanshan Zhang; Mingshan Zhao; Zhenlin Wu

doi:10.1117/12.3046341

13 December 2024 Highly sensitive refractive index sensing based on SOI subwavelength grating microring resonators

Shaoshuai Han, Mingxiang Yang, Hongxia Gao, Shanshan Zhang, Mingshan Zhao, Zhenlin Wu

Author Affiliations +

Proceedings Volume 13502, AOPC 2024: AI in Optics and Photonics; 1350203 (2024) https://doi.org/10.1117/12.3046341
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China

Abstract

In recent years silicon-based optoelectronic chips have great advantages in biochemical sensing due to their unique advantages. In this paper, the dispersion mechanism of a racetrack microring resonator based on a subwavelength grating waveguide is theoretically investigated, and the relationship between the electric field distributions of different parts and their parameters is studied. A highly sensitive silicon-based subwavelength grating microring resonator sensor is designed and fabricated by two-step etching photolithography process. The structure improves the sensitivity of the sensor compared with the conventional microring sensor. The resonance principle of this structure is not limited by the free spectral range due to focusing on the envelope peaks instead of individual resonance peaks. This is one of the highest refractive index sensing sensitivities reported for a microring resonator with a sensing sensitivity of 860.3 nm/RIU.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shaoshuai Han, Mingxiang Yang, Hongxia Gao, Shanshan Zhang, Mingshan Zhao, and Zhenlin Wu "Highly sensitive refractive index sensing based on SOI subwavelength grating microring resonators", Proc. SPIE 13502, AOPC 2024: AI in Optics and Photonics, 1350203 (13 December 2024); https://doi.org/10.1117/12.3046341

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KEYWORDS

Microrings

Waveguides

Refractive index

Microresonators

Resonators

Optical gratings

Dispersion

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