Back-illuminated large-format Loral CCDs

Michael P. Lesser

doi:10.1117/12.45323

1 July 1991 Back-illuminated large-format Loral CCDs

Michael P. Lesser

Proceedings Volume 1447, Charge-Coupled Devices and Solid State Optical Sensors II; (1991) https://doi.org/10.1117/12.45323
Event: Medical Imaging '91, 1991, San Jose, CA, United States

Abstract

The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 X 1024 and 800 X 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

Citation Download Citation

Michael P. Lesser "Back-illuminated large-format Loral CCDs", Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); https://doi.org/10.1117/12.45323

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