Accuracy of phase-shifting interferometry: phase-shifter calibration and error compensation

Rihong Zhu; Jinbang Chen; Lei Chen; Liandu Liu; Mingyi Chen

doi:10.1117/12.135355

1 January 1992 Accuracy of phase-shifting interferometry: phase-shifter calibration and error compensation

Rihong Zhu, Jinbang Chen, Lei Chen, Liandu Liu, Mingyi Chen

Proceedings Volume 1553, Laser Interferometry IV: Computer-Aided Interferometry; (1992) https://doi.org/10.1117/12.135355
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The accuracy of phase shifting interferometers is impaired by mechanical drifts and vibrations, intensity variations, nonlinearities of the photoelectric detection device, and, most seriously, by inaccuracies of the reference phase shifter. This paper presents a new method to correct the phase shifter by using an iterative process relying on the carrier fringes and the Fourier transform algorithm to analyze the carrier fringes. The phase shifter inaccuracies can be displayed by a special Lissajous display technique.

Citation Download Citation

Rihong Zhu, Jinbang Chen, Lei Chen, Liandu Liu, and Mingyi Chen "Accuracy of phase-shifting interferometry: phase-shifter calibration and error compensation", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); https://doi.org/10.1117/12.135355

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