Multidimensional displacement sensor using the optical feedback of laser diodes

Jun-ichi Kato; Ichirou Yamaguchi; Nobuhiko Kikuchi; Shigeo Ozono

doi:10.1117/12.135288

1 January 1992 Multidimensional displacement sensor using the optical feedback of laser diodes

Jun-ichi Kato, Ichirou Yamaguchi, Nobuhiko Kikuchi, Shigeo Ozono

Author Affiliations +

Proceedings Volume 1553, Laser Interferometry IV: Computer-Aided Interferometry; (1992) https://doi.org/10.1117/12.135288
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A compact optical displacement sensor is reported which is based on the light undulation caused by the optical feedback on a frequency modulated laser diode. For applying this effect to the metrology, the relationship between the feedback rate and the oscillation behavior of the laser diode was investigated experimentally. As the result, it was found that the higher order of the output undulation could be suppressed by keeping the feedback rate low, and displacement measurement was performed with a resolution of 25 nm for the target distance between a few cm and 30 cm. In addition, an improved current modulation scheme for a laser diode as well as a new signal processing techniques for improving the performance is reported. As a further application, this sensor system was extended for precise measurement of two-dimensional displacement by utilizing a spherical retro-reflector.

Citation Download Citation

Jun-ichi Kato, Ichirou Yamaguchi, Nobuhiko Kikuchi, and Shigeo Ozono "Multidimensional displacement sensor using the optical feedback of laser diodes", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); https://doi.org/10.1117/12.135288

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Modulation

Reflectors

Semiconductor lasers

Signal detection

Laser energy

Signal processing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years