Paper
1 December 1991 Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique
Xu Liu, Jinfa Tang, Emile P. Pelletier
Author Affiliations +
Abstract
The loss of thin films is one of the critical parameters that limit the performances of optical thin film devices. Photothermal deflection technique has been used to measure the attenuation coefficients of the different modes in thin film guiding layers. Due to the high sensitivity of the attenuations of guided modes to the imperfaction factors of thin film, a new method is proposed to analyze the loss mechanisms of the thin film samples on separating the absorption and scattering losses. The experimental results are given, and the anealing process of thin film is also studied with this method.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xu Liu, Jinfa Tang, and Emile P. Pelletier "Analysis of thin-film losses from guided wave attenuations with photothermal deflection technique", Proc. SPIE 1554, Second International Conference on Photomechanics and Speckle Metrology, (1 December 1991); https://doi.org/10.1117/12.49493
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KEYWORDS
Signal attenuation

Thin films

Scattering

Waveguides

Absorption

Refractive index

Wave propagation

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