Observation and control of thin-film defects using in-situ total-internal-reflection microscopy

Forrest L. Williams; Gary A. Peterson Jr.; Reed A. Schmell; Charles K. Carniglia

doi:10.1117/12.60111

29 July 1992 Observation and control of thin-film defects using in-situ total-internal-reflection microscopy

Forrest L. Williams, Gary A. Peterson Jr., Reed A. Schmell, Charles K. Carniglia

Proceedings Volume 1624, Laser-Induced Damage in Optical Materials: 1991; (1992) https://doi.org/10.1117/12.60111
Event: Laser-Induced Damage in Optical Materials: 1991, 1991, Boulder, CO, United States

Abstract

Total internal reflection microscopy (TIRM) is an inspection method that yields an image of the defects in a surface and/or a dielectric thin film. By installing a TIRM system in a vacuum-deposition chamber, the formation of thin-film defects (visible as point-scatter sites) is directly observable. By using such a system, we have examined the effects of deposition conditions on thin-film defect generation. In this preliminary investigation, the rate of defect accumulation in ZrO₂ thin films produced by electron-beam (e-beam) evaporation displays a dependence on substrate cleanliness, with cleaner surfaces yielding lesser defect-formation rates. In addition, the presence of film crystallites can be observed by in-situ TIRM, and shows a dependence on the oxygen partial pressure during deposition.

Citation Download Citation

Forrest L. Williams, Gary A. Peterson Jr., Reed A. Schmell, and Charles K. Carniglia "Observation and control of thin-film defects using in-situ total-internal-reflection microscopy", Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); https://doi.org/10.1117/12.60111

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available