Electrolyte electroreflectance spectroscopies for the ion-implanted HgCdTe with thermal annealing

Shi-Chen Chao; Gwo-Jen Jan; Kuo-Tung Hsu; Feng-Yuh Juang; Tin-Fung Chang; Jia-Song Wu

doi:10.1117/12.137793

1 September 1992 Electrolyte electroreflectance spectroscopies for the ion-implanted HgCdTe with thermal annealing

Shi-Chen Chao, Gwo-Jen Jan, Kuo-Tung Hsu, Feng-Yuh Juang, Tin-Fung Chang, Jia-Song Wu

Proceedings Volume 1685, Infrared Detectors and Focal Plane Arrays II; (1992) https://doi.org/10.1117/12.137793
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Electrolyte electroreflectance (EER) is used to investigate the near surface properties of HgCdTe. We used the technique of EER coupled with electrochemical etching. Annealing of B ion-implanted HgCdTe with ZnS encapsulation and anode sulfide film is studied. The results of fitting parameters show that a highly disordered surface layer exists after implantation, and an obvious recovery occurs after the sample is annealed at 200 degree(s)C. It also shows that there are no obvious improvements when the sample is annealed at 300 degree(s)C. The sample encapped with CdS film is better than uncapped CdS film. We found that the composition of Cd at the surface changes due to the chemical interaction of anode sulfide film. It also shows that the sulfide active CdS film can improve the adherence of ZnS to the MCT substrate and make the sample more stable.

Citation Download Citation

Shi-Chen Chao, Gwo-Jen Jan, Kuo-Tung Hsu, Feng-Yuh Juang, Tin-Fung Chang, and Jia-Song Wu "Electrolyte electroreflectance spectroscopies for the ion-implanted HgCdTe with thermal annealing", Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); https://doi.org/10.1117/12.137793

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