Automated visual quality evaluation of CVD film

W. Philip Kegelmeyer Jr.; Wilfred J. Hansen

doi:10.1117/12.58563

1 March 1992 Automated visual quality evaluation of CVD film

W. Philip Kegelmeyer Jr., Wilfred J. Hansen

Proceedings Volume 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics; (1992) https://doi.org/10.1117/12.58563
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

This study describes the implementation and performance of a new image analysis algorithm, ALOET, as applied to automatically distinguishing between acceptable and unacceptable chemical vapor deposition (CVD) diamond film. ALOET is a texture feature which measures the homogeneity of the edge orientations in a local window, and which is useful in differentially characterizing large and small polycrystalline structures. The analysis in this study includes a performance metric for film quality evaluation, numerical and visual performance results, and an example analytical model for determining the algorithm's control parameters.

Citation Download Citation

W. Philip Kegelmeyer Jr. and Wilfred J. Hansen "Automated visual quality evaluation of CVD film", Proc. SPIE 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics, (1 March 1992); https://doi.org/10.1117/12.58563

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