Fringe-scanning white-light microscope for surface profile measurement and material identification

Kumiko Matsui; Satoshi Kawata

doi:10.1117/12.132119

20 October 1992 Fringe-scanning white-light microscope for surface profile measurement and material identification

Kumiko Matsui, Satoshi Kawata

Author Affiliations +

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132119
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A new fringe-scanning microscope based on a coherence probe microscope is described for measuring both the surface profile and the local material of a heterogeneous sample in nanometer depth resolution. The basic configuration is a white-light double-beam interferometer with either a Michelson or Mirau objective lens. The sample stage is moved down during the measurement and an interference image is collected at every stage-height. The surface profile is reconstructed in the computer by tracing the darkest point of the white- light interferogram for each pixel. The surface material is identified pixel by pixel by calculating the amplitude and the phase reflectivity of the spectrum by Fourier transforming a local interferogram or taking a cross-correlation of it with reference ones. Experimental examples of surface profile reconstruction, including a sample with film on it, are shown. An experimental result of local material identification is also presented.

Citation Download Citation

Kumiko Matsui and Satoshi Kawata "Fringe-scanning white-light microscope for surface profile measurement and material identification", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132119

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