Control of spectrum of laser-induced periodical relief on GaAs surface in photochemical etching

Alexander I. Khudobenko; Vladislav Ya. Panchenko; Vladimir K. Popov; Vladimir N. Seminogov

doi:10.1117/12.58627

1 April 1992 Control of spectrum of laser-induced periodical relief on GaAs surface in photochemical etching

Alexander I. Khudobenko, Vladislav Ya. Panchenko, Vladimir K. Popov, Vladimir N. Seminogov

Author Affiliations +

Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58627
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

The process of periodic structure formation on the GaAs surface by laser induced wet etching has been investigated. The exponential growth rates of the structures were measured in situ for the first time. The influence of the various etchants on the relief spectrum has been studied. Phased diffraction gratings with controled periods in 0.35-0.5 μm range have been obtained. The physical mechanism of this phenomena was established by the comparison of the theoretical and experimental results.

Citation Download Citation

Alexander I. Khudobenko, Vladislav Ya. Panchenko, Vladimir K. Popov, and Vladimir N. Seminogov "Control of spectrum of laser-induced periodical relief on GaAs surface in photochemical etching", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); https://doi.org/10.1117/12.58627

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