Effects of incoherent scattering on ellipsometry

Soe-Mie F. Nee

doi:10.1117/12.138780

11 December 1992 Effects of incoherent scattering on ellipsometry

Soe-Mie F. Nee

Proceedings Volume 1746, Polarization Analysis and Measurement; (1992) https://doi.org/10.1117/12.138780
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Scattering pick-up from sample and environment is unavoidable in ellipsometric measurements, especially in the short wavelength region. Incoherent scattering has special properties that can simplify the analysis. The four-zone averaging in null ellipsometry can effectively cancel most of the scattering-induced errors. For rotating analyzer or rotating polarizer ellipsometry, the incoherent scattering from the sample causes the measured cos 2(Psi) and cos (Delta) to be smaller than the corresponding real cos 2(Psi) and cos (Delta) ; the incoherent scattering from the environment has similar effects for cos (Delta) as that from the sample. If the error by scattering dominates over the instrumental errors, the near-angle scattering can be estimated by comparing the results between null ellipsometry and rotating analyzer ellipsometry.

Citation Download Citation

Soe-Mie F. Nee "Effects of incoherent scattering on ellipsometry", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); https://doi.org/10.1117/12.138780

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