New diffractive optical elements

Sergei T. Bobrov; Boris N. Kotletsov; Yuri G. Turkevich

doi:10.1117/12.138874

13 January 1993 New diffractive optical elements

Sergei T. Bobrov, Boris N. Kotletsov, Yuri G. Turkevich

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138874
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Two classes of DOE in which fabrication is based on the technology used in microelectronics are considered: multiorder binary-phase (Dammann) gratings, and diffractive aberration correctors. Calculating the structure of the element is necessary to take into account the unavoidable technological deviations from the theoretical profile. The current presentation describes the methods and results of computation and fabrication of up to 41 equal orders gratings with optimal combination of diffraction efficiency and technological stability and aberration correctors for the focusing objectives of a laser player. The variants of such objectives permitting reduction of the technological difficulties of corrector fabrication are discussed.

Citation Download Citation

Sergei T. Bobrov, Boris N. Kotletsov, and Yuri G. Turkevich "New diffractive optical elements", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138874

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