Multidetector photopolarimeters for industrial optical sensing and metrology

Rasheed M. A. Azzam

doi:10.1117/12.145544

28 May 1993 Multidetector photopolarimeters for industrial optical sensing and metrology

Rasheed M. A. Azzam

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145544
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Considerable progress has been achieved recently in the development of new ellipsometric and polarimetry sensors that meet the requirements of an industrial environment. In particular, multidetector instruments, such as the four-detector photopolarimeter (FDP or Stokes meter), are particularly suited for fast, on-line, and real-time monitoring of industrial processes because of their simplicity, ruggedness, and absence of moving parts. We review some of these recent developments with reference to the semiconductor, steel-making, and optical- coating industries as examples.

Citation Download Citation

Rasheed M. A. Azzam "Multidetector photopolarimeters for industrial optical sensing and metrology", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145544

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available