Film life enhancement of chemically amplified electron-beam resists

Theodore H. Fedynyshyn; Michael Francis Cronin; James W. Thackeray

doi:10.1117/12.146533

24 June 1993 Film life enhancement of chemically amplified electron-beam resists

Theodore H. Fedynyshyn, Michael Francis Cronin, James W. Thackeray

Proceedings Volume 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III; (1993) https://doi.org/10.1117/12.146533
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

A key resist requirement for electron beam sensitive resists is an extended film life of up to 12 weeks, the demands of which far exceed the reported film life of current high resolution acid catalyzed electron beam sensitive resists. Simple techniques are described which increase the coated film life of acid catalyzed electron beam resists, specifically MICROPOSIT^TM SAL^TM603 E-Beam Resist, to greater than 12 weeks. Evidence shows that water in the resist film is the likely cause of decreasing resist sensitivity. Finally, it is demonstrated that electron beam sensitive negative acid catalyzed resists have sufficient film life stability to be a viable choice for routine mask making applications.

Citation Download Citation

Theodore H. Fedynyshyn, Michael Francis Cronin, and James W. Thackeray "Film life enhancement of chemically amplified electron-beam resists", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); https://doi.org/10.1117/12.146533

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available