Positive DUV resist (APEX-E) by IBM for SVGL Micrascan

Vasanti A. Deshpande; Nathan S. Thane; John S. Hargreaves; Yumiko Takamori; Eric M. Apelgren; Peter Freeman; Karey L. Holland

doi:10.1117/12.148938

4 August 1993 Positive DUV resist (APEX-E) by IBM for SVGL Micrascan

Vasanti A. Deshpande, Nathan S. Thane, John S. Hargreaves, Yumiko Takamori, Eric M. Apelgren, Peter Freeman, Karey L. Holland

Author Affiliations +

Proceedings Volume 1926, Integrated Circuit Metrology, Inspection, and Process Control VII; (1993) https://doi.org/10.1117/12.148938
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

The imaging performance of IBM's positive DUV resist is evaluated on SVGL Micrascan. Preliminary results on GCA excimer laser are included. Contamination effects are studied using 0.5 micron lines and spaces on Micrascan I using cross-sections at various delay times. The effects of delay times between different processing steps such as coat to expose and expose to PEB are studied. The performance is further evaluated by processing wafer lots on line for Micrascan I and II. Data on resolution, depth of focus and process latitude are presented for 0.35 and 0.5 micron geometries. The effects of PEB temperature variation are studied. Performance on different substrates (poly, metals and contacts) is evaluated.

Citation Download Citation

Vasanti A. Deshpande, Nathan S. Thane, John S. Hargreaves, Yumiko Takamori, Eric M. Apelgren, Peter Freeman, and Karey L. Holland "Positive DUV resist (APEX-E) by IBM for SVGL Micrascan", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.148938

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available