Comparison of scalar and vector diffraction modeling for deep-UV lithography

Bruce W. Smith; Donis G. Flagello; Joseph R. Summa; Lynn F. Fuller

doi:10.1117/12.150481

8 August 1993 Comparison of scalar and vector diffraction modeling for deep-UV lithography

Bruce W. Smith, Donis G. Flagello, Joseph R. Summa, Lynn F. Fuller

Proceedings Volume 1927, Optical/Laser Microlithography; (1993) https://doi.org/10.1117/12.150481
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

This paper describes investigations into scalar and vector diffraction modeling for 248 nm lithography. An experimental design approach was used to study the effects and interactions of coherence, polarization, and numerical aperture on a resist feature response. An exposure latitude response to achieve 10% linewidth control with +/- 0.3 micron of defocus was utilized. Both vector and scalar diffraction models were used to simulate process runs. Experimental comparisons were made using a variable NA, variable coherence deep-UV projection system, adapted for control of polarization at the aperture of the mask. Exposure latitude response surfaces are presented, along with details on isolated process runs.

Citation Download Citation

Bruce W. Smith, Donis G. Flagello, Joseph R. Summa, and Lynn F. Fuller "Comparison of scalar and vector diffraction modeling for deep-UV lithography", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); https://doi.org/10.1117/12.150481

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