Paper
13 August 1993 High-fill-factor suspended-resistor IR scene generator: design, fabrication, and preliminary performance
Alan P. Pritchard, Michael C. Hebbron, Stephen Paul Lake, Ian M. Sturland
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Abstract
We describe an experimental program of design, fabrication and preliminary performance of an infrared scene generator system designed as a 256 X 256 element electrically heated pixel array. Each pixel consists of a suspended resistor element which has a high area fill factor, being designed as a 3D structure of an electronic drive backplane. Initial performance shows that a practical device can be designed with around 300 degree(s)C temperature range.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alan P. Pritchard, Michael C. Hebbron, Stephen Paul Lake, and Ian M. Sturland "High-fill-factor suspended-resistor IR scene generator: design, fabrication, and preliminary performance", Proc. SPIE 1967, Characterization, Propagation, and Simulation of Sources and Backgrounds III, (13 August 1993); https://doi.org/10.1117/12.151039
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Cited by 1 scholarly publication.
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KEYWORDS
Resistors

Oxides

Temperature metrology

Metals

Silicon

Infrared radiation

Etching

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