Surface profilometry by means of wavelength-shifting in spectral modulation

J. Calatroni

doi:10.1117/12.2308803

23 July 1993 Surface profilometry by means of wavelength-shifting in spectral modulation

J. Calatroni

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AO (1993) https://doi.org/10.1117/12.2308803
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

A novel method for measuring the displacement of moving objective regardless of its rotation and scaling is introduced. The algorithm, the results of computer emulation and the experimental results are presented.

Citation Download Citation

J. Calatroni "Surface profilometry by means of wavelength-shifting in spectral modulation", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AO (23 July 1993); https://doi.org/10.1117/12.2308803

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