A laser measurement system for measuring flatness, parallelism and perpendicularity of large workpieces

Jia Wang

doi:10.1117/12.2308811

23 July 1993 A laser measurement system for measuring flatness, parallelism and perpendicularity of large workpieces

Jia Wang

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AW (1993) https://doi.org/10.1117/12.2308811
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

A magnetic disk surface profilometer employing point to point scanning method is presented. The profilometer can be used to measure flatness, global and local profile in circumference, straightness and local fine profile in radius. The theoretical resolution is 0.3 urn, accuracy of the sensor is better than 0.04 ni, dynamic range is larger than 10 mm.

Citation Download Citation

Jia Wang "A laser measurement system for measuring flatness, parallelism and perpendicularity of large workpieces", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AW (23 July 1993); https://doi.org/10.1117/12.2308811

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