Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics

Paolo Conconi; U. Bergamini; Oberto Citterio; Giuseppe Crimi; Mauro Ghigo; Francesco Mazzoleni

doi:10.1117/12.167226

1 February 1994 Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics

Paolo Conconi, U. Bergamini, Oberto Citterio, Giuseppe Crimi, Mauro Ghigo, Francesco Mazzoleni

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167226
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The use of an optical bench operating with UV or visible light, provide an easy and quick way for making a first assessment of the quality of replicated grazing incidence x-ray optics. The mirror to be analyzed is fully illuminated by means of a collimated beam of light and the image at the focal plane is analyzed with a CCD camera. The limit of this approach is given by the diffraction effect which could be important in the visible due to the large obscuration factor which is intrinsic to grazing incidence optics. The paper presents an analysis of the diffraction effect and how to separate the intrinsic aberrations from the diffraction. The use of an UV source (275 nm) is also reported in order to minimize the diffraction effects.

Citation Download Citation

Paolo Conconi, U. Bergamini, Oberto Citterio, Giuseppe Crimi, Mauro Ghigo, and Francesco Mazzoleni "Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167226

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