Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam

Philippe Troussel; S. Bac; Robert J. Barchewitz; A. Sammar; Daniel Schirmann; A. Mirone; Philippe Guerin

doi:10.1117/12.167217

1 February 1994 Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam

Philippe Troussel, S. Bac, Robert J. Barchewitz, A. Sammar, Daniel Schirmann, A. Mirone, Philippe Guerin

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167217
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We give an experimental study of soft x-ray diffraction by various laminar multilayer amplitude grating mirrors made by electron beam lithography. The +1, 0, -1 diffraction order efficiencies in the grating rule scan model and their positions were measured using synchrotron radiation on the Super-Aco at L.U.R.E in the X-UV region, particularly above the silicon L edge. These efficiencies were compared with values obtained in the detector scan mode. Their diffraction pattern were analyzed and discussed with a model. We describe a modular X-UV spectrogoniometer (0 - 20 goniometer).

Citation Download Citation

Philippe Troussel, S. Bac, Robert J. Barchewitz, A. Sammar, Daniel Schirmann, A. Mirone, and Philippe Guerin "Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167217

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