Snorkel-type conical objective lens with E cross B field for detecting secondary electrons

Mitsugu Sato; Hideo Todokoro; Kaneo Kageyama

doi:10.1117/12.155697

3 September 1993 Snorkel-type conical objective lens with E cross B field for detecting secondary electrons

Mitsugu Sato, Hideo Todokoro, Kaneo Kageyama

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155697
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A new optical system has been developed which employs a snorkel type conical objective lens that allows high resolution imaging at high tilt angles, up to 45 degrees. An E cross B field for detecting secondary electrons is utilized in this optical system in order to avoid influence upon the primary beam from the extraction field generated by the usual scintillator secondary electron detector. Spatial resolution of better than 4 nm at an accelerating voltage of 1 kV has been obtained from a secondary electron image, with a working distance of 3 mm.

Citation Download Citation

Mitsugu Sato, Hideo Todokoro, and Kaneo Kageyama "Snorkel-type conical objective lens with E cross B field for detecting secondary electrons", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155697

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