Mass-limited laser-plasma cryogenic target for 13 nm point x ray sources for lithography

Feng Jin; Kai Gabel; Martin C. Richardson; Masataka Kado; Andrew F. Vasil'ev; Daniel Salzmann

doi:10.1117/12.167993

1 February 1994 Mass-limited laser-plasma cryogenic target for 13-nm point x-ray sources for lithography

Feng Jin, Kai Gabel, Martin C. Richardson, Masataka Kado, Andrew F. Vasil'ev, Daniel Salzmann

Proceedings Volume 2015, Applications of Laser Plasma Radiation; (1994) https://doi.org/10.1117/12.167993
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We propose the use of mass-limited, line emitting cryogenic targets for SXPL, which permit a continuous supply of targets without the problem of particulate debris and excessive heating of multilayer optics by an intense x-ray flux in wavelength regions outside the multilayer bandwidth. In preliminary experiments we measured the oxygen line emission in the vicinity of 13 nm. The x-ray emitting plasma was produced by using a laser intensity of 2 X 10¹² W/cm² on the surface of an ice target. From the observed crater on target we can deduce that clusters are also ejected from cryogenic targets.

Citation Download Citation

Feng Jin, Kai Gabel, Martin C. Richardson, Masataka Kado, Andrew F. Vasil'ev, and Daniel Salzmann "Mass-limited laser-plasma cryogenic target for 13-nm point x-ray sources for lithography", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); https://doi.org/10.1117/12.167993

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